Two new layouts have been implemented at Fraunhofer IPMS for electrochemical analysis. The chip size is 5 x 5 mm2 in each case. The chips have well-defined gold electrodes and one silver electrode each, which can be subsequently chlorinated to be used as a reference electrode. The chips are designed to be used with the Fraunhofer IPMS measurement adapter (see above), which contacts the electrodes via gold pins and can be connected directly to a potentiostat.
Chip description electrochemical analytical chip 7
The analytical chip 7 consists of 4 gold electrodes and a silver electrode arranged in the center (see above). The electrodes have a diameter of approx. 107 µm. Each electrode can be connected individually via a 700 x 700 µm contact pad.
Chip description electrochemical analytical chip 8
Analytical chip 8, shown above left and center, has a threeelectrode arrangement with a centered small silver electrode (1 960 µm2 ) that can be used as a reference electrode, a gold working electrode (181 000 µm2 ), and a counter electrode (181 000 µm2 ) also made of gold.
SEM: FIB cut
To avoid penetration of the measuring solution at the electrode edges, electrodes are designed to overlap the edge. In the example shown in Fig. 1, for example, this is 3.8 µm. The extent of the overlap can be adjusted.
Contact pads of the chips
With a size of 0.7 x 0.7 mm2 each, the contact pads of chip 7 and 8 are large enough to be contacted with a needle adapter or even small, back-insulated crocodile clips.
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