AURA-WAVE is an Electron Cyclotron Resonance (ECR) coaxial plasma source designed to self-adapt once the plasma is ignited. By combining a magnetic field with electromagnetic waves, it facilitates plasma creation at low pressures, making it suitable for applications such as PECVD, reactive ion etching, ALD, surface treatment, reactive species generation, biological decontamination, deep etching, and general etching processes.