This technology provides deposition of both passive and active thin films for photonic integrated platforms and panel-level packaging. Passive materials such as Si3N4 are used for waveguide structures, while active materials including AlScN, BTO, BFO, and LiNbO3 (LN) offer high electro-optic performance. The solution delivers low-loss films, partially CMOS-compatible processes, and scalable manufacturing. It also includes design optimization, as well as thermal and stress management for reliable photonic integration.
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Offer Details
Specifications and Deliverables:
• Wafer sizes up to 300 mm diameter and panel sizes up to 600 mm x 600 mm
• Thermal management tailored to specified power requirements
• Compatibility with CMOS processing environments
• Deposition of passive (e.g., Si3N4) and active electro-optic materials (AlScN, BTO, BFO, LN)
• Material development and customization
• Thin film deposition and process optimization
• Optical characterization and performance evaluation
• Process recipes for integration into manufacturing
• Support for large-area and panel-level fabrication
Value Proposition:
• Deposition of both passive and active films for complete photonic integration solutions
• High-performance electro-optic materials enabling advanced PIC functionality
• Low-loss films for efficient optical signal transmission
• CMOS-compatible and scalable processes for industrial manufacturing
• Integrated support including design optimization, thermal, and stress management
Input Required from Customer:
• Target application (e.g., PIC, LiDAR, telecom, sensing)
• Required optical and electro-optic material properties
• Substrate type, wafer or panel size specifications
• Design and integration requirements for photonic systems
• Thermal and power constraints
• Production scale and manufacturing requirements
Fields of Application:
Patent/Publication Number
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Adress:
Dresden
Saxony
01277
Germany
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