A highly versatile tool that combines SEM with a focused ion beam (FIB) of gallium ions. The SEM operates with a field emission gun (FEG) that provides high beam intensity and stability. Imaging can be done with secondary (for SEM and FIB) and backscattered (for SEM) electrons.

A STEM detector delivers a resolution of 0.8 nm at 30 kV. For element analysis and mapping, an EDX detector is available. An ultra-high resolution (UHR) stage and flip stages are available inside the microscope.