Instrumentation
- Pyrometers
- Oscilloscope
- Optical emission spectroscopy
- Residual gas analyzer
- Thermocouples
- Ellipsometer
- Film stress measurement tool
- Profilometer
- 4-point probe for electrical resistivity
Consumables
- Sputter targets
- Gases
- Substrates
Resources
- Analytical lab
- Training space
Capabilities
The lab’s industrial and optical vacuum coaters enable a variety of capabilities for thin-film deposition:
- Single- and dual-magnetron sputtering (SMS and DMS)
- DC and pulsed DC up to 150/350 kHz
- Bipolar pulsing up to 150 kHz
- Dynamic Reverse Pulsing (DRP)
- Anode applications
- HiPIMS capabilities
- Drum bias (RF, DC, pulsed DC, HiPIMS)
- PowerInsight by Advanced EnergyTM
