Our in-line coater allow evaluation of sputtering processes and coatings on flat substrates up to 600 x 800 mm2 size.
Specification and capabilities:
- Radiant heater up to 350°C
- DC glow discharge plasma treatment with argon, oxygen, nitrogen
- AC glow discharge plasma treatment
- Dual Magnetron System (by Sputtering Components SCI inc.)
- 3x PK75o Magnetrons with 750 mm cathode length allowing for 550 mm homogenenous coating with
- double side coatings
- 2x rotatable magnetron (SCI) with target length 550 mm
- Multiple power supplies available: DC, pulsed DC, bipolar, HIPIMS
- Coating of metal, oxide and nitride layers in metallic, reactive and oxidic configurations
- Equipment for controlled reactive sputtering processes available
- In-situ reflectometry
