Machine name: |
Organic Vapour Phase Deposition (OVPD) |
Machine type: |
OVPD Pilot-to-Production Line |
Substrate types to be processed: |
Glass, Polymer |
Substrate dimension: |
20×20 cm |
Technologies available: |
Deposition of Organic small molecules based on the gas phase transport principle, In-line metrology tools (Spectroscopic Ellipsometry and Raman Spectroscopy (RS) |
Deposition materials available: |
Organic small molecules |
Typical applications: |
Printed electronics (OPVs & OLEDs) |
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