Machine name: | Organic Vapour Phase Deposition (OVPD) |
Machine type: | OVPD Pilot-to-Production Line |
Substrate types to be processed: | Glass, Polymer |
Substrate dimension: | 20×20 cm |
Technologies available: | Deposition of Organic small molecules based on the gas phase transport principle, In-line metrology tools (Spectroscopic Ellipsometry and Raman Spectroscopy (RS) |
Deposition materials available: | Organic small molecules |
Typical applications: | Printed electronics (OPVs & OLEDs) |
