An ultra-high vacuum (UHV) system to analyze the chemical composition of samples by means of X-ray Photoelectron Spectroscopy (XPS). It has a depth resolution of 1-10 nm via depth profiling and lateral resolution down to ~1 μm.
The complementary techniques that are also available are reflection electron energy loss spectroscopy (REELS), ion scattering spectroscopy (ISS) and ultraviolet photoelectron spectroscopy (UPS).