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Inline Sputter Pilot Plant Doro

Our in-line coater allow evaluation of sputtering processes and coatings on flat substrates up to 600 x 800 mm2 size.

Specification and capabilities:

  • Radiant heater up to 350°C
  • DC glow discharge plasma treatment with argon, oxygen, nitrogen
  • AC glow discharge plasma treatment
  • Dual Magnetron System (by Sputtering Components SCI inc.)
  • 3x PK75o Magnetrons with 750 mm cathode length allowing for 550 mm homogenenous coating with
  • double side coatings
  • 2x rotatable magnetron (SCI) with target length 550 mm
  • Multiple power supplies available: DC, pulsed DC, bipolar, HIPIMS
  • Coating of metal, oxide and nitride layers in metallic, reactive and oxidic configurations
  • Equipment for controlled reactive sputtering processes available
  • In-situ reflectometry

 

Deliverables

Specifications and Deliverables
You will receive:
– coated substrates (up to 800 x 600 mm²)
– consulting, process data
Value Proposition
Feasibility studies and pilot production of coated glass, plastic, metal surfaces e.g. for optical applications, corrosion resistance, transparent conductors, smart windows.
We support your decision making for selecting and buying production equipment in the field of thin film coating.

More Info and Video

Website describing the offering
Additional documents (Flyers, Specification Sheets, Material Safety Datasheets…)

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Author Info

Lars Büker

Member since 1 month ago
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