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Large-Area Laser Scanning 3D Confocal Microscopy

Equipment

Keyence VK-X1050 + Custom-made platform for large area measurements

Technical specifications

Up to 300 × 600 mm scanning area
X,Y-resolution: 200 nm
Z-resolution: 10 nm

Application examples

Depth profiling and defect density characterisation in masters for nano/micro patterning and quality control of nano-imprinted films (UC1)

Deliverables

Specifications and Deliverables
Up to 300 × 600 mm scanning area
X,Y-resolution: 200 nm
Z-resolution: 10 nm

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Elena Turco

Member since 3 months ago
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