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Spectroscopic ellipsometry

Functionalities

Spectroscopic ellipsometry (thin film thickness; refractive index, dispersion)

Equipment

HORIBA: UVISEL-VASE

Technical specifications

Samples Sizes up to 10 × 10 cm Spectral Range: 250 -1100 nm
Possibility of in-line measurements in R2R pilot line
Variable angle, 0.6-6.5 eV, real-time measurements

Application examples

Determination of thin film thickness and optical constants for optical-grade functional coatings (UC4)

Deliverables

Specifications and Deliverables
Samples Sizes up to 10 × 10 cm Spectral Range: 250 -1100 nm
Possibility of in-line measurements in R2R pilot line
Variable angle, 0.6-6.5 eV, real-time measurements

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