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Large-Area Laser Scanning 3D Confocal Microscopy
Equipment
Keyence VK-X1050 + Custom-made platform for large area measurements
Technical specifications
Up to 300 × 600 mm scanning area
X,Y-resolution: 200 nm
Z-resolution: 10 nm
Application examples
Depth profiling and defect density characterisation in masters for nano/micro patterning and quality control of nano-imprinted films (UC1)
Deliverables
Specifications and Deliverables
Up to 300 × 600 mm scanning area
X,Y-resolution: 200 nm
Z-resolution: 10 nm
X,Y-resolution: 200 nm
Z-resolution: 10 nm
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