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Organic Vapour Phase Deposition (OVPD)

Machine name:

Organic Vapour Phase Deposition (OVPD)

Machine type:

OVPD Pilot-to-Production Line

Substrate types to be processed:

Glass, Polymer

Substrate dimension:

20×20 cm

Technologies available:

Deposition of Organic small molecules based on the gas phase transport principle, In-line metrology tools (Spectroscopic Ellipsometry and Raman Spectroscopy (RS)

Deposition materials available:

Organic small molecules

Typical applications:

Printed electronics (OPVs & OLEDs)

Deliverables

Specifications and Deliverables
Substrate types to be processed: Glass, Polymer
Substrate dimension: 20×20 cm

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