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Field Emission Scanning electron microscopy (SEM)

Equipment

FEI Quanta 650 FEG Environmental SEM (including Peltier and Heating Stage)
Hitachi SU-8000
JEOL JSM-IT-300LV
JEOL Neoscope JCM-
5000

Application examples

Ultra-high resolution surface imaging for morphological/topographical characterization, failure analysis and or contamination detection

Deliverables

Specifications and Deliverables
Voltage: 1 – 30 kV
SEM Imaging (Resolution 1 nm)
Low vacuum and Environmental SEM Imaging for sensitive materials and noncoated samples
EDXS (Chemical analysis)
Cooling/Heating stage (in-situ): –20 ºC –
1500 ºC
SE/BSE detectors (Topographical/Structural analysis)

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